Micro electro-mechanical systems (MEMS) technology has been applied to various fields and created many innovative devices. Among them, in this presentation, we focus on RFMEMS devices, which are RF devices fabricated based on MEMS technology. Novel RF MEMS devices not only passive devices but also active devices have been proposed and paid attention due to their superior characteristics. Commercialization of RF MEMS devices is slower than what we expect, because it has reliability issues caused by a moving part or fabrication process is complex. However, RF MEMS devices are promising and future possibilities of MEMS technology application to RF field are still opened. In the presentation, we introduce RF MEMS device fabrication technology based on bulk micromachining which has dielectric-air-metal (DAM) structure. Moreover, we also introduce our surface micromachining based RF MEMS devices. We also discuss prospect of 3D printing technology based RF MEMS devices, which is a wide-spread and versatile fabrication tool at present. Speaker(s): Sang-Seok, Room: 4016, Bldg: SRYE, 10285 University Dr, Simon Fraser University-Surrey, Surrey, British Columbia, Canada, V3T 0N1, Virtual: https://events.vtools.ieee.org/m/474817