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Fabrication Technologies for RFMEMS Devices
Room: 4016, Bldg: SRYE, 10285 University Dr, Simon Fraser University-Surrey, Surrey, British Columbia, Canada, V3T 0N1, Virtual: https://events.vtools.ieee.org/m/474817Micro electro-mechanical systems (MEMS) technology has been applied to various fields and created many innovative devices. Among them, in this presentation, we focus on RFMEMS devices, which are RF devices... Read more