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Room: 4016, Bldg: SRYE, 10285 University Dr, Simon Fraser University-Surrey, Surrey, British Columbia, Canada, V3T 0N1, Virtual: https://events.vtools.ieee.org/m/474817

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Fabrication Technologies for RFMEMS Devices

Room: 4016, Bldg: SRYE, 10285 University Dr, Simon Fraser University-Surrey, Surrey, British Columbia, Canada, V3T 0N1, Virtual: https://events.vtools.ieee.org/m/474817

Micro electro-mechanical systems (MEMS) technology has been applied to various fields and created many innovative devices. Among them, in this presentation, we focus on RFMEMS devices, which are RF devices fabricated based on MEMS technology. Novel RF MEMS devices not only passive devices but also active devices have been proposed and paid attention due to... Read more →